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Plasma cleaning machine V1000/1000X/1000XS
Plasma cleaning machine V1000/1000X/1000XS
Product details
13.56MHz high-frequency output plasma cleaning machine, equipped with RIE · DP dual-mode
Use plasma surface treatment equipment. Emphasis is placed on desktop high-performance models that are easy to use, with simple data retrieval and electronic materials as the center, and can be used for various purposes.
features
The electrode structure can be changed to improve the plasma effect.
Equipped with high-precision adapter and high-performance RF power supply.
Customization can be provided according to the required specifications.
purpose
Ashing and etching of silicon wafers
● Surface dirt treatment of substrate
IC/LED packaging, BGA/CSP substrate processing
Dry cleaning of electronic materials for semiconductor related components
● Natural oxide film · Organic matter removal
● Interface activation treatment
● Surface pollutant removal
Inner groove
Specifications
Pipeline connection diagram
Use plasma surface treatment equipment. Emphasis is placed on desktop high-performance models that are easy to use, with simple data retrieval and electronic materials as the center, and can be used for various purposes.
features
The electrode structure can be changed to improve the plasma effect.
Equipped with high-precision adapter and high-performance RF power supply.
Customization can be provided according to the required specifications.
purpose
Ashing and etching of silicon wafers
● Surface dirt treatment of substrate
IC/LED packaging, BGA/CSP substrate processing
Dry cleaning of electronic materials for semiconductor related components
● Natural oxide film · Organic matter removal
● Interface activation treatment
● Surface pollutant removal
Inner groove
Specifications
| model | V1000 | V1000X | V1000XS |
| Plasma mode | DP/RIE | ||
| High frequency power supply | 13.56MHz | ||
| output power | Max1000W | Max1000 & 1500W | |
| Effective electrode size | W280×D280mm | W300×D300mm | W400×D375mm |
| electrode | Parallel Plate | 2-segment electrode (independent) | Tablet (Multi purpose) |
| Reactive gas | Aggregation controller 2 system (filling gas path to be installed separately) | ||
| Vacuum pump (standard) | About 1000L/min | About 1500L/min | 1000 & 1500L/min |
| Safety device | Door detection switch, interlocking mechanism, emergency stop switch, temperature rise prevention device, etc | ||
Pipeline connection diagram
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